In order to characterize the transfer behavior of topography sensors, comparative measurements with reference sensors on critical surface structures provide a useful approach. For this purpose, a multisensor measuring system is developed by the measurement technology group of the University of Kassel. This system comprises an active vibration damping as well as a granite base plate with the geometrical dimensions of (1000 x  800 x 100) mm³ to effectively supress external vibrations. In addition, two portals of granite are placed on top of the base plate, where five different vertically oriented topography sensors are arranged side by side, as depicted in Fig. 1. Two orthogonally arranged air bearing linear stages are used to laterally position a specimen in the measuring volume of the respective topography sensor.