Optical Metrology R1a

Overview

Credits points: 6

Workload:
60 hours course attendance; 120 hours self-study

Semester: winter

Language: English

Module type: elective

Module usability: M.Sc. Electrical Communication Engineering, M.Sc. Elektrotechnik

Module duration: one semester

Required qualifications:
knowledge in optics, material science and semiconductor devices (Fundamentals in
Optoelectronics B2a); signal processing and sensors, e.g. “Sensoren und Messsysteme”

Competences to be acquired

Knowledge in modern measurement technologies used in current research and industrial applications

Ability to estimate potentials and limitations of optical measurement techniques

Experience in information gathering and presentation techniques of complex technical subjects

Courses

Principles of Optical Metrology (sem)

Content

Repetition of light wave and ray optical principles
Repetition of diffraction phenomena and Fourier optics
Microscopic imaging and image processing techniques
Confocal microscopy, Interferometry, white-light interferometer, integrated interferometers, interference microscopes
Fiber-Bragg-Grating sensors, repetition of optical fibers
Optical sensors and applied devices in optical sensors (including: microoptics, adaptive optics, diffractive optical elements)
Principles and application of optical in-process measurement
Thin-film preparation and measurement techniques (ellipsometry, RHEED)
Absorption, transmission, spectroscopy, gas-sensors
Intra-Cavity-Absorption-Spectroscopy, mode competition
Photoluminescence, Scanning Electron Microscope, Tunneling Electron Microscope
Atomic Force Microscope (AFM), cantilever based sensors
Scanning near-field optical sensors, Magneto Resistive Effects.

Learning outcomes

Overview on measurement techniques and operating principles
Principals of optical sensors, scope of applications
Learning about modern concepts of precision metrology
Getting practical experience in optical measurement set-ups
Establishing synergies between engineering disciplines and natural sciences
Finding access to theses in the innovative field of optical technologies
Introduction to the 21st century as the “century of photonics and nano technology”

Details

Lecturer: Peter Lehmann and team
Teaching method: seminar
SWS: 2
Credit points: 3
Examination: seminar attendance and presentation
Course identifier: FB16-4204

Optical Metrology (lab)

Content

Repetition of light wave and ray optical principles
Repetition of diffraction phenomena and Fourier optics
Microscopic imaging and image processing techniques
Confocal microscopy, Interferometry, white-light interferometer, integrated interferometers, interference microscopes
Fiber-Bragg-Grating sensors, repetition of optical fibers
Optical sensors and applied devices in optical sensors (including: microoptics, adaptive optics, diffractive optical elements)
Principles and application of optical in-process measurement
Thin-film preparation and measurement techniques (ellipsometry, RHEED)
Absorption, transmission, spectroscopy, gas-sensors
Intra-Cavity-Absorption-Spectroscopy, mode competition
Photoluminescence, Scanning Electron Microscope, Tunneling Electron Microscope
Atomic Force Microscope (AFM), cantilever based sensors
Scanning near-field optical sensors, Magneto Resistive Effects

Learning outcomes

Overview on measurement techniques and operating principles
Principals of optical sensors, scope of applications
Learning about modern concepts of precision metrology
Getting practical experience in optical measurement set-ups
Establishing synergies between engineering disciplines and natural sciences
Finding access to theses in the innovative field of optical technologies
Introduction to the 21st century as the “century of photonics and nano technology”

Details

Lecturer: Peter Lehmann and team
Teaching method: lab training
SWS: 2
Credit points: 3
Examination: lab training attendance and conductance of experiments
Course identifier: FB16-4203