Optoelectronic Technologies R1a

Overview

Credits points: 6

Workload:
60 hours course attendance; 120 hours self-study

Semester: summer

Language: English

Module type: elective

Module usability: M.Sc. Electrical Communication Engineering, M.Sc. Elektrotechnik

Module duration: one semester

Required qualifications:
Basic knowledge on semiconductor devices (transistor, laser diode, LED, photo diode), material science and optics

Knowledge in micromachining, devices, thin layer and clean room technologies

Methodology in specialized miniaturization schemes and integration of electronic and optoelectronic devices and systems

Knowledge of design, fabrication and use of nanoelectronic, (opto-)electronic and micromachined devices

Introduction to modern fabrication processes, technology of fibers, wave guides, lasers
Crystal growth: semiconductor wafers, thin layer epitaxy
Lithography: optical, X-ray, electron-beam, ion-beam, EUVL, nano imprint
Plasma processing and vacuum technology
Deposition techniques: evaporation, sputtering, plasma assisted techniques
Dry and wet-chemical etching and clean room technology

Understanding the fundamentals in micromachining, micro-opto-electro-mechanical systems (MOEMS) and optical MOEMS
Understanding the fundamentals of semiconductor technology including specific processes, schemes and required instrumentation

Fabrication technology of electronic devices (planar transistor, electronic integrated chips), optoelectronic devices (semiconductor lasers, gratings) and micro-optoelectro-mechanical systems (MOEMS)
Introduction to micromachining, microsystem techniques, miniaturization, packaging and nanotechnology
Reasons for miniaturization and integration, types of micromachining
Sensors and actuators
Large variety of MEMS and MOEMS examples: membranes, springs, resonator elements, cantilevers, valves, manipulation elements, gripping tools, light modulators, optical switches, beam splitters, projection displays, micro optical bench, data distribution, micromachined tunable filters and lasers
Displays: micromachined (micromirror) displays, laser display technology, vacuumelectronics
Lab tour in the clean room

Methodology, interdisciplinary aspects, future perspectives and market trends
Finding solutions using interdisciplinary analogies
Establishing synergies between engineering disciplines and natural sciences
Introduction to the 21st century as the “century of photonics and nano technology”