White light interferometry (WLI) has been established for the measurement of precision-machined surfaces with an altitude resolution in the nanometer range. In a previous project, a Michelson and a Linnik interferometer were developed, which can be used in production-related areas for passive com­pen­sa­tion of spurious oscillations. The WLI information is com­pen­sa­ted using a distance-measuring laser interferometer which is integrated into the setup. In order to improve the robustness and compactness of the system, the usage as a Mirau interferometer is realized in the current project. In addition, the influence of inexpensive linear axes is researched, whose tracking fluc­tua­tions should be recorded by the laser interferometer and subsequently be adjusted.
The algorithm to be developed will be able to evaluate mea­sure­ments in real time, so that the duration of the measurement will only be limited by the speed of the white light topographical depth scan.