Technology of Electronic and Optoelectronic Devices (FB16-8500)
Technology of Electronic and Optoelectronic Devices (FB16-8500)
(Prof. Dr. T. Kusserow/Prof. Dr. H. Hillmer)
Diese Vorlesung wird nur in Englisch gehalten.
Contents
Topics covered in this lecture:
- Fundamental concepts and cprocesses
- Clean room technology
- Vacuum technology
- Materials of electronic and optoelectronic devices
- Wafer fabrication
- Deposition technology
- Lithography methods
- Etching processes
- Doping of semiconductors, thermal annealing, wafer fusion/onding
- Examples for typical device fabrication
Literature
- Menz: Microsystem Technology, Wiley-VCH
- Gerlach: Introduction to Microsystem Technology, Wiley
- Jackson: Handbook of Semiconductor Technology, Wiley-VCH
- van Zant: Microchip Fabrication, McGraw-Hill
- Brodie: The Physics of Micro/Nano-Fabrication, Plenum Press
- Cui: Nanofabrication, Springer
- Cabrini: Nanofabrication Handbook, CRC Press
- Frey: Handbook of Thin-Film Technology, Springer
- Eckertova: Physics of Thin-Films, Plenum Press
- Mack: Optical Lithography, Wiley
- Kang: Micro/Nano Replication, Wiley
- Nojiri: Dry Etching Technology for Semiconductors, Springer
- Memming: Semiconductor Electrochemistry, Wiley-VCH