Scanning electron microscope Ultra Plus (Zeiss)
The Zeiss Ultra Plus field emission scanning electron microscope enables the acquisition of images with a magnification of up to 1,000,000x. The resolution is given by the manufacturer at 0.8 nm. In addition to In Lens and SE2 detectors, BSD, EDX and EBSD detectors are available.
The Schottky field emission gun can generate low to medium energy electrons with selectable acceleration voltage between 0.02 kV and 30 kV.
The airlock makes it possible to carry out comparatively fast sample swapsin a chamber with a high vacuum of better than 2.10-6 mbar.
The stage, which can carry samples weighing up to 0.5 kg, allows travels of 130 mm in the X and Y directions and 50 mm in the Z direction. There is also the option of continuous 360° rotation of the samples and tilting from -3° to 70°.