Publikationen 2009

Tagungsbeiträge

  • P. Lehmann,
    High Precision Micro-topography Measurement based on Low-coherence Interferometry,
    Proceedings 5th Sino-German Symposium on Micro- and Nano-Production, Measurement and Application, 2009.
     
  • P. Lehmann, M. Schulz, J. Niehues,
    Fiber optical interferometric sensor based on mechanical oscillation,
    SPIE Proceedings 7389, (2009) 738915.
     
  • P. Lehmann, J. Niehues,
    Limitations and Optimization of Low-coherence Interferometry for High Precision Microscopic Form Measurement,
    Proceedings Fringe 2009, Springer-Verlag, 244-249.