Publications 2012

Conference Proceedings

  • M. Schulz, P. Lehmann, S. Erdmann,
    Faseroptischer Sensor mit interferometrischer Miniatursonde zum Messen von spiegelnden Oberflächen,XXVI. Messtechnisches Symposium des AHMT e.v., Aachen, 20.-22. September 2012
     
  • P. Lehmann,
    Transfer characteristics of 3D optical pofilometers close to their lateral resolution limit,6th Sino-german Symposium on Micro- and Nano-Production, Measurement and Application, 2012.
     
  • P. Lehmann, J. Niehues, W. Xie, J. Riebeling,
    Measurement of rectangular edge and grating structures using extended low-coherence interferometry
    SPIE Proceedings 8430 (2012) 84300U.

Journals

  • J. Niehues, P. Lehmann, W. Xie,
    Low coherent Linnik interferometer optimized for use in nano-measuring machines,
    Meas. Sci. Technol. 23 (2012) 125002 (9pp)
     
  • W. Xie, P. Lehmann, J. Niehues,
    Übertragungsverhalten von tiefenscannenden Weißlichtinterferometern,
    Technisches Messen 79, Nr. 4 (2012) 229-236.
     
  • P. Lehmann, W. Xie, J. Niehues,
    Transfer characteristics of rectangular phase gratings in interference microscopy,
    Optics Letters 37, No. 4 (2012) 758-760.
     
  • W. Xie, P. Lehmann, J. Niehues,
    Lateral Resolution and Transfer Characteristics of Vertical Scanning White-Light Interferometers,
    Applied Optics 51, No. 11 (2012) 1795-1803.

Patents

  • P. Lehmann, M. Schulz
    Vorrichtung und Verfahren zur interferometrischen Abstandsbestimmung
    Patent specification DE 10 2011 001 161 B4 (25.10.2012)