Publications 2014

Conference Proceedings

  • P. Kühnhold, H. Knell, P. Lehmann, S. Laubach, G. Ehret
    Mikroskop-basierter interferometrischer Zeilensensor zum schnellen Scannen optischer Funktionsflächen
    XXVIII. Messtechnisches Symposium, Saarbrücken, Sept. 2014
     
  • M. Schake, M. Schulz, P. Lehmann
    High-resolution fiber-coupled interferometric point sensor for micro- and nano-metrology
    58th Ilmenau Scientific Colloquium, Sept. 2014
     
  • H. Knell, M. Schake, M. Schulz, P. Lehmann
    Interferometric sensors based on sinusoidal optical path length modulation
    SPIE, Proceedings 9132, Optical Micro- and Nanometrology, 91320I (2014)
     
  • J. Niehues, P. Lehmann, J. Riebeling
    Messen von Submikrometer-Strukturen mittels Weißlichtinterferometrie,
    17. ITG/-GMA Fachtagung Sensoren und Messsysteme, 2014
     
  • P. Lehmann, W. Xie, P. Kühnhold, H. Knell, J. Niehues, M. Schulz
    Coherence aspects in interferometers for surface topography measurement,
    Invited Talk, International Symposium on Optoelectronic Technology and Application, Bejing 2014
     

Journals

  • P. Lehmann, J. Niehues, S. Tereschenko
    3-D optical interference microscopy at the lateral resolution limit
    International Journal of Optomechatronics 8, Issue 4 (2014) 231-241
     
  • H. Knell, S. Laubach, G. Ehret, P. Lehmann
    Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation
    Optics Express (accepted for publication)
     
  • P. Lehmann, P. Kühnhold, W. Xie
    Reduction of chromatic aberration influences in vertical scanning white-light interferometry,
    Meas. Sci. Technol. 25 (2014) 065203 (9pp)
     
  • S. Tereschenko, P. Kühnhold, P. Lehmann, L. Zellmer, A. Brückner-Foit
    Tiefenscannende Weißlichtinterferometrie in maschinennaher Umgebung,
    tm – Technisches Messen 81, Nr. 6 (2014) 269-279